Inventor
SCHIMITZEK KARL-HEINZ
DE3 patents
Patents
3 patentsUS8902401B2Dec 2, 2014
Optical imaging device with thermal attenuation
ZEISS CARL SMT GMBH1 citations61
US8363206B2Jan 29, 2013
Optical imaging device with thermal attenuation
ZEISS CARL SMT GMBH2 citations61
US9810996B2Nov 7, 2017
Optical imaging device with thermal attenuation
ZEISS CARL SMT GMBH0 citations50