Inventor
GEYPEN NIELS
NL8 patents
Patents
8 patentsUS9910366B2Mar 6, 2018
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV9 citations83
US10331041B2Jun 25, 2019
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations72
US10234771B2Mar 19, 2019
HHG source, inspection apparatus and method for performing a measurement
ASML NETHERLANDS BV2 citations72
US10126662B2Nov 13, 2018
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10816906B2Oct 27, 2020
HHG source, inspection apparatus and method for performing a measurement
ASML NETHERLANDS BV1 citations62
US10670974B2Jun 2, 2020
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate
ASML NETHERLANDS BV1 citations60
US10401739B2Sep 3, 2019
Method of aligning a pair of complementary diffraction patterns and associated metrology method and apparatus
ASML NETHERLANDS BV1 citations59
US10725386B2Jul 28, 2020
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations51