Inventor
OGATA Shoichiro
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OGATA Shoichiro”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
4 patentsUS10982347B2Apr 20, 2021
Leak checking method, leak checking apparatus, electroplating method, and electroplating apparatus
EBARA CORP0 citations60
US10458036B2Oct 29, 2019
Leak checking method, leak checking apparatus, electroplating method, and electroplating apparatus
EBARA CORP0 citations49
US11248308B2Feb 15, 2022
Substrate holder and plating apparatus with substrate holder
EBARA CORP0 citations48
US11598017B2Mar 7, 2023
Method of plating
EBARA CORP0 citations44