Inventor
HAMAYA ZENICHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HAMAYA ZENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
6 patentsUS9804510B2Oct 31, 2017
Interferometer system, lithography apparatus, and article manufacturing method
CANON KK12 citations79
US10095117B2Oct 9, 2018
Imprint apparatus
CANON KK4 citations72
US11314167B2Apr 26, 2022
Imprint apparatus, imprint method, and method for manufacturing article
CANON KK0 citations50
US9217937B2Dec 22, 2015
Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing device
CANON KK0 citations50
US7646488B2Jan 12, 2010
Positioning apparatus, exposure apparatus, and device manufacturing method
CANON KK0 citations48
US11747722B2Sep 5, 2023
Imprint method, imprint apparatus, and method of manufacturing article
CANON KK0 citations45