Inventor
ZHANG XINMING
US7 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG XINMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS10014185B1Jul 3, 2018
Selective etch of metal nitride films
APPLIED MATERIALS INC22 citations92
US12347679B2Jul 1, 2025
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations61
US12327763B2Jun 10, 2025
Treatment methods for titanium nitride films
APPLIED MATERIALS INC0 citations61
US11823901B2Nov 21, 2023
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations61
US11587789B2Feb 21, 2023
System and method for radical and thermal processing of substrates
APPLIED MATERIALS INC0 citations60
US11859277B2Jan 2, 2024
Catalyst enhanced molybdenum deposition and gap fill
APPLIED MATERIALS INC0 citations50