Inventor
NAYA KOTARO
JP6 patents
Patents
6 patentsUS4770609ASep 13, 1988
Two-stage vacuum pump apparatus and method of operating the same
HITACHI LTD38 citations92
US5223052AJun 29, 1993
Method of treating surfaces of rotors of the screw type rotary machine
HITACHI LTD27 citations91
US4993930AFeb 19, 1991
Vacuum pump apparatus and shaft sealing device therefor
HITACHI LTD24 citations91
US5314321AMay 24, 1994
Screw-type rotary fluid machine including rotors having treated surfaces
HITACHI LTD39 citations90
US4797068AJan 10, 1989
Vacuum evacuation system
HITACHI LTD48 citations89
US4714418ADec 22, 1987
Screw type vacuum pump
HITACHI LTD31 citations89