Inventor
ADAMS EDWARD U
US2 patents
Patents
2 patentsUS4859280AAug 22, 1989
Method of etching silicon by enhancing silicon etching capability of alkali hydroxide through the addition of positive valence impurity ions
HARRIS CORP7 citations69
US4781853ANov 1, 1988
Method of enhancing silicon etching capability of alkali hydroxide through the addition of positive valence impurity ions
HARRIS CORP9 citations69