Inventor
SEITOH SHIGEMITSU
JP4 patents
Patents
4 patentsUS5093616AMar 3, 1992
Voltage measurement method using electron beam
HITACHI LTD12 citations73
US4605860AAug 12, 1986
Apparatus for focusing a charged particle beam onto a specimen
HITACHI LTD9 citations73
US5111141AMay 5, 1992
Magnetic field measurement optimization apparatus using a charged particle beam
HITACHI LTD7 citations72
US4922097AMay 1, 1990
Potential measurement device
HITACHI LTD18 citations72