Inventor

SUSOEFF MICHAEL N

US3 patents

Patents

3 patents

US5901271AMay 4, 1999

Process of evaporating a liquid in a cyclone evaporator

NOVELLUS SYSTEMS INC30 citations91

US5653813AAug 5, 1997

Cyclone evaporator

NOVELLUS SYSTEMS INC39 citations91

US6039074AMar 21, 2000

Pressure-induced shut-off valve for a liquid delivery system

NOVELLUS SYSTEMS INC33 citations88