Inventor
OKUTOH AKIRA
JP4 patents
Patents
4 patentsUS6180974B1Jan 30, 2001
Semiconductor storage device having a capacitor electrode formed of at least a platinum-rhodium oxide
SHARP KK60 citations95
US6201271B1Mar 13, 2001
Semiconductor memory device prevented from deterioration due to activated hydrogen
SHARP KK65 citations94
US6162293ADec 19, 2000
Method for manufacturing ferroelectric thin film, substrate covered with ferroelectric thin film, and capacitor
SHARP KK26 citations91
US6576942B2Jun 10, 2003
Diffusion prevention film and a semiconductor storage device
SHARP KK14 citations82