Inventor
EDELBERG ERIK
US3 patents
Patents
3 patentsUS7204934B1Apr 17, 2007
Method for planarization etch with in-situ monitoring by interferometry prior to recess etch
LAM RES CORP10 citations81
US7542134B2Jun 2, 2009
System, method and apparatus for in-situ substrate inspection
LAM RES CORP4 citations60
US7397555B2Jul 8, 2008
System, method and apparatus for in-situ substrate inspection
LAM RES CORP1 citations49