Inventor

GREENBERG GAD

IL3 patents

Patents

3 patents

US6072897AJun 6, 2000

Dimension error detection in object

APPLIED MATERIALS INC61 citations90

US7133549B2Nov 7, 2006

Local bias map using line width measurements

APPLIED MATERIALS INC10 citations69

US7486814B2Feb 3, 2009

Local bias map using line width measurements

APPLIED MATERIALS INC1 citations47