Inventor
SADE AMI
IL4 patents
Patents
4 patentsUS7133549B2Nov 7, 2006
Local bias map using line width measurements
APPLIED MATERIALS INC10 citations69
US11204312B2Dec 21, 2021
In-situ full wafer metrology system
APPLIED MATERIALS INC0 citations60
US11047039B2Jun 29, 2021
Substrate carrier having hard mask
APPLIED MATERIALS INC0 citations58
US7486814B2Feb 3, 2009
Local bias map using line width measurements
APPLIED MATERIALS INC1 citations47