Inventor
HEMAR SHIRLEY
IL3 patents
Patents
3 patentsUS7072502B2Jul 4, 2006
Alternating phase-shift mask inspection method and apparatus
APPLIED MATERIALS INC32 citations90
US7133549B2Nov 7, 2006
Local bias map using line width measurements
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US7486814B2Feb 3, 2009
Local bias map using line width measurements
APPLIED MATERIALS INC1 citations47