Inventor

HALLING ALFRED M

US3 patents

⚠️ This page may combine multiple inventors who share the name “HALLING ALFRED M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US7692164B2Apr 6, 2010

Dose uniformity correction technique

AXCELIS TECH INC4 citations56

US6984832B2Jan 10, 2006

Beam angle control in a batch ion implantation system

AXCELIS TECH INC5 citations53

(unassigned)

1 patent

US6600163B2Jul 29, 2003

In-process wafer charge monitor and control system for ion implanter

18 citations76