Inventor
RHEE HYUG-GYO
KR11 patents
⚠️ This page may combine multiple inventors who share the name “RHEE HYUG-GYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOREA RES INST STANDARDS & SCI
6 patentsUS11906281B2Feb 20, 2024
Device and method for measuring thickness and refractive index of multilayer thin film by using angle-resolved spectral reflectometry
KOREA RES INST STANDARDS & SCI2 citations69
US11255662B2Feb 22, 2022
System and method for compensating for non-linear response characteristic in phase-shifting deflectometry
KOREA RES INST STANDARDS & SCI0 citations53
US11243070B2Feb 8, 2022
Apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometry
KOREA RES INST STANDARDS & SCI0 citations48
US9863814B2Jan 9, 2018
Correction of rotational inaccuracy in lateral shearing interferometry
KOREA RES INST STANDARDS & SCI1 citations45
US11486700B2Nov 1, 2022
System and method for 3D shape measurement of freeform surface based on high-speed deflectometry using composite patterns
KOREA RES INST STANDARDS & SCI0 citations44
US10466031B2Nov 5, 2019
Apparatus for measuring thickness and surface profile of multilayered film structure using imaging spectral optical system and measuring method
KOREA RES INST STANDARDS & SCI0 citations39
KOREA RES INSTITUTE OF STANDARD AND SCIENCE
2 patentsUS11466978B2Oct 11, 2022
Apparatus and method for measuring the thickness and refractive index of multilayer thin films using angle-resolved spectral interference image according to polarization
KOREA RES INSTITUTE OF STANDARD AND SCIENCE1 citations57
US12474165B2Nov 18, 2025
Calibration method for deflectometry method, for improving measurement accuracy
KOREA RES INSTITUTE OF STANDARD AND SCIENCE0 citations42
RHEE HYUG-GYO
2 patentsUS9223223B2Dec 29, 2015
Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the same
RHEE HYUG-GYO2 citations56
US9707714B2Jul 18, 2017
Apparatus and method for manufacturing fine pattern using interferogram of optical axis direction
RHEE HYUG-GYO0 citations35