Inventor
AOKI KATSUO
5 patents
⚠️ This page may combine multiple inventors who share the name “AOKI KATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON DENSO CO
4 patentsUS4096822AJun 27, 1978
Gaseous atmosphere control apparatus for a semiconductor manufacturing system
NIPPON DENSO CO56 citations95
US4075972AFeb 28, 1978
Apparatus for thermal diffusion of semiconductor devices
NIPPON DENSO CO14 citations73
US4147432AApr 3, 1979
Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates
NIPPON DENSO CO11 citations72
US4069009AJan 17, 1978
Apparatus for transferring semiconductor wafers
NIPPON DENSO CO8 citations70