Inventor

MIYAGAWA MASAFUMI

JP3 patents

Patents

3 patents

US4610079ASep 9, 1986

Method of dicing a semiconductor wafer

TOKYO SHIBAURA ELECTRIC CO111 citations94

US4589004AMay 13, 1986

Semiconductor device monolithically comprising a V-MOSFET and bipolar transistor isolated from each other

TOKYO SHIBAURA ELECTRIC CO54 citations91

US4451303AMay 29, 1984

Diffusion of aluminum

TOKYO SHIBAURA ELECTRIC CO9 citations71