Inventor

WANG LON A

TW3 patents

⚠️ This page may combine multiple inventors who share the name “WANG LON A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IND TECH RES INST

2 patents

US6045954AApr 4, 2000

Formation of silicon nitride film for a phase shift mask at 193 nm

IND TECH RES INST29 citations89

US6319568B1Nov 20, 2001

Formation of silicon nitride film for a phase shift mask at 193 nm

IND TECH RES INST9 citations71

CHANG JER-HAUR

1 patent

US8092737B2Jan 10, 2012

Method of micro/nano imprinting

CHANG JER-HAUR29 citations84