Inventor

HANSON KYLE M

US101 patents

⚠️ This page may combine multiple inventors who share the name “HANSON KYLE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HANSON KYLE M

SEMITOOL INC

Electroplating apparatus with segmented anode array

Methods and apparatus for processing the surface of a microelectronic workpiece

Reactor vessel having improved cup anode and conductor assembly

Apparatus for electrochemically processing a workpiece including an electrical contact assembly having a seal member

System for electrochemically processing a workpiece

Methods and apparatus for processing the surface of a microelectronic workpiece

Semiconductor plating system workpiece support having workpiece engaging electrodes with distal contact part and dielectric cover

Diffuser with spiral opening pattern for an electroplating reactor vessel

Workpiece processor having processing chamber with improved processing fluid flow

Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece

Reactor vessel having improved cup, anode and conductor assembly

Reactor vessel having improved cup, anode, and conductor assembly

Methods and apparatus for processing the surface of a microelectronic workpiece

Reactor assembly and method of assembly

Reactor vessel having improved cup, anode and conductor assembly

Semiconductor processing workpiece support with sensory subsystem for detection of wafers or other semiconductor workpieces

Cathode current control system for a wafer electroplating apparatus

Apparatus for electrochemically processing a microelectronic workpiece

Cathode current control system for a wafer electroplating apparatus

Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces

Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces

Reactor vessel having improved cup, anode and conductor assembly

Electroplating reactor including back-side electrical contact apparatus

Semiconductor processing workpiece support with sensory subsystem for detection of wafers or other semiconductor workpieces

Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece

Methods and apparatus for processing the surface of a microelectronic workpiece

Apparatus for processing the surface of a microelectronic workpiece

Methods and apparatus for processing the surface of a microelectronic workpiece

Plating system workpiece support having workpiece-engaging electrodes with distal contact-part and dielectric cover

Chambers, systems, and methods for electrochemically processing microfeature workpieces

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

Adaptable electrochemical processing chamber

Method and apparatus for executing plural processes on a microelectronic workpiece at a single processing station

Electroplating reactor including back-side electrical contact apparatus

Single workpiece processing system

Chambers, systems, and methods for electrochemically processing microfeature workpieces

Workpiece processor having processing chamber with improved processing fluid flow

Apparatus and methods for electrochemical processing of microelectronic workpieces

System for processing a workpiece

Electroplating apparatus with segmented anode array

Chambers, systems, and methods for electrochemically processing microfeature workpieces

Single workpiece processing system

System for electrochemically processing a workpiece

Apparatus and method for deposition of an electrophoretic emulsion

Electroplating reactor

APPLIED MATERIALS INC

Post exposure processing apparatus

Apparatus for post exposure bake

MCHUGH PAUL R

Electrochemical processor

RYE JASON A

Single side workpiece processing

WOODRUFF DANIEL J

Deplating contacts in an electrochemical plating apparatus