Inventor

SHULMAN BENIAMIN

IL3 patents

Patents

3 patents

US6368181B1Apr 9, 2002

Apparatus for optical inspection of wafers during polishing

NOVA MEASURING INSTR LTD19 citations90

US6390767B1May 21, 2002

Positioning assembly

NOVA MEASURING INSTR LTD17 citations77

US7320265B2Jan 22, 2008

Article transfer system

NOVA MEASURING INSTR LTD0 citations38