Inventor
HAYASHI AKINARI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI AKINARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
3 patentsUS10519543B2Dec 31, 2019
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP3 citations71
US11203488B2Dec 21, 2021
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP1 citations60
US10847397B2Nov 24, 2020
Substrate transfer unit, and substrate processing apparatus
KOKUSAI ELECTRIC CORP1 citations60
HITACHI INT ELECTRIC INC
2 patentsUS9695509B2Jul 4, 2017
Substrate processing apparatus, purging apparatus, method of manufacturing semiconductor device, and recording medium
HITACHI INT ELECTRIC INC17 citations83
US10703565B2Jul 7, 2020
Substrate processing apparatus, substrate container transport system and operation mechanism
HITACHI INT ELECTRIC INC1 citations60