Inventor
AKUTSU NORIO
JP3 patents
⚠️ This page may combine multiple inventors who share the name “AKUTSU NORIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
2 patentsUS6638860B2Oct 28, 2003
Method and apparatus for processing substrates and method for manufacturing a semiconductor device
HITACHI INT ELECTRIC INC14 citations82
US6927165B2Aug 9, 2005
Method and apparatus for processing substrates and method for manufacturing a semiconductor device
HITACHI INT ELECTRIC INC4 citations60