Inventor
VAN BALLEGOIJ ROBERTUS NICODEM
NL5 patents
Patents
5 patentsUS6473161B2Oct 29, 2002
Lithographic projection apparatus, supporting assembly and device manufacturing method
ASML NETHERLANDS BV33 citations91
US6906786B2Jun 14, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations90
US7361911B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7072025B2Jul 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US7030967B2Apr 18, 2006
Lithographic apparatus, device manufacturing method and substrate holder
ASML NETHERLANDS BV1 citations47