Inventor

VAN NUNEN GERARDUS PETRUS MATT

NL2 patents

Patents

2 patents

US7352434B2Apr 1, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV178 citations98

US7030967B2Apr 18, 2006

Lithographic apparatus, device manufacturing method and substrate holder

ASML NETHERLANDS BV1 citations47