P

Inventor

HOFMANS GERARDUS CAROLUS JOHANNUS

NL7 patents
⚠️ This page may combine multiple inventors who share the name “HOFMANS GERARDUS CAROLUS JOHANNUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOFMANS GERARDUS CAROLUS JOHANNUS

3 patents
US8446564B2May 21, 2013

Lithographic apparatus and device manufacturing method

HOFMANS GERARDUS CAROLUS JOHANNUS2 citations56
US8436998B2May 7, 2013

Method of measuring focus of a lithographic projection apparatus

HOFMANS GERARDUS CAROLUS JOHANNUS3 citations56
US8289516B2Oct 16, 2012

Method of measuring focus of a lithographic projection apparatus

HOFMANS GERARDUS CAROLUS JOHANNUS2 citations56

STAALS FRANK

2 patents
US8208122B2Jun 26, 2012

Method of measuring a lithographic projection apparatus

STAALS FRANK7 citations82
US8554510B2Oct 8, 2013

Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product

STAALS FRANK5 citations71

GERAETS HUBERTUS ANTONIUS

1 patent
US8908148B2Dec 9, 2014

Calibration method and inspection apparatus

GERAETS HUBERTUS ANTONIUS9 citations76

ASML NETHERLANDS BV

1 patent
US7502096B2Mar 10, 2009

Lithographic apparatus, calibration method, device manufacturing method and computer program product

ASML NETHERLANDS BV7 citations67