Inventor
OESTERHOLT RENE
NL10 patents
Patents
10 patentsUS7408655B2Aug 5, 2008
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV72 citations98
US7292312B2Nov 6, 2007
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV139 citations98
US7256871B2Aug 14, 2007
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV146 citations98
US7880901B2Feb 1, 2011
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV63 citations97
US7859686B2Dec 28, 2010
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV61 citations97
US7528965B2May 5, 2009
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV69 citations97
US7374957B2May 20, 2008
Method of calibrating or qualifying a lithographic apparatus or part thereof, and device manufacturing method
ASML NETHERLANDS BV11 citations83
US7239368B2Jul 3, 2007
Using unflatness information of the substrate table or mask table for decreasing overlay
ASML NETHERLANDS BV10 citations81
US7502096B2Mar 10, 2009
Lithographic apparatus, calibration method, device manufacturing method and computer program product
ASML NETHERLANDS BV7 citations67
US8368902B2Feb 5, 2013
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV1 citations62