Inventor
KATTOUW HANS ERIK
NL4 patents
Patents
4 patentsUS7502096B2Mar 10, 2009
Lithographic apparatus, calibration method, device manufacturing method and computer program product
ASML NETHERLANDS BV7 citations67
US11599027B2Mar 7, 2023
Lithographic process and apparatus and inspection process and apparatus
ASML NETHERLANDS BV0 citations58
US11199782B2Dec 14, 2021
Lithographic process and apparatus and inspection process and apparatus
ASML NETHERLANDS BV0 citations58
US12449735B2Oct 21, 2025
Sub-field control of a lithographic process and associated apparatus
ASML NETHERLANDS BV0 citations55