Inventor
WEI DAVID
TW25 patents
⚠️ This page may combine multiple inventors who share the name “WEI DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
15 patentsUS6984892B2Jan 10, 2006
Semiconductor structure implementing low-K dielectric materials and supporting stubs
LAM RES CORP23 citations92
US7307025B1Dec 11, 2007
Lag control
LAM RES CORP26 citations91
US7892445B1Feb 22, 2011
Wafer electrical discharge control using argon free dechucking gas
LAM RES CORP23 citations90
US6896586B2May 24, 2005
Method and apparatus for heating polishing pad
LAM RES CORP26 citations89
US7425501B2Sep 16, 2008
Semiconductor structure implementing sacrificial material and methods for making and implementing the same
LAM RES CORP5 citations74
US6808442B1Oct 26, 2004
Apparatus for removal/remaining thickness profile manipulation
LAM RES CORP12 citations74
US6719874B1Apr 13, 2004
Active retaining ring support
LAM RES CORP7 citations73
US6749491B1Jun 15, 2004
CMP belt stretch compensation apparatus and methods for using the same
LAM RES CORP12 citations71
US7875548B2Jan 25, 2011
Method for making semiconductor structures implementing sacrificial material
LAM RES CORP1 citations63
US6976906B2Dec 20, 2005
Apparatus for reducing compressed dry air usage during chemical mechanical planarization
LAM RES CORP3 citations63
US6656024B1Dec 2, 2003
Method and apparatus for reducing compressed dry air usage during chemical mechanical planarization
LAM RES CORP5 citations63
US6761626B2Jul 13, 2004
Air platen for leading edge and trailing edge control
LAM RES CORP3 citations62
US7789991B1Sep 7, 2010
Lag control
LAM RES CORP4 citations61
US7018276B2Mar 28, 2006
Air platen for leading edge and trailing edge control
LAM RES CORP0 citations51
US6878048B2Apr 12, 2005
CMP belt stretch compensation apparatus and methods for using the same
LAM RES CORP1 citations49
BENK TECH CO LTD E
4 patentsUS7202904B2Apr 10, 2007
Video monitoring device
BENK TECH CO LTD E37 citations92
US6967790B2Nov 22, 2005
Detachable zoom lens assembly
BENK TECH CO LTD E20 citations92
US7180547B2Feb 20, 2007
Camera platform assembly
BENK TECH CO LTD E13 citations83
US6877915B1Apr 12, 2005
Tripod
BENK TECH CO LTD E15 citations83