Inventor
WANG HWA-CHI
US23 patents
⚠️ This page may combine multiple inventors who share the name “WANG HWA-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR LIQUIDE AMERICAN
21 patentsUS5963336AOct 5, 1999
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN108 citations97
US6392745B1May 21, 2002
Method and apparatus for the fast detection of surface characteristics
AIR LIQUIDE AMERICAN55 citations96
US6154284ANov 28, 2000
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN61 citations94
US5992216ANov 30, 1999
Method to analyze particle contaminants in compressed gases
AIR LIQUIDE AMERICAN18 citations92
US5665902ASep 9, 1997
Method to analyze particle contaminants in compressed gases
AIR LIQUIDE AMERICAN26 citations92
US5209102AMay 11, 1993
Method of introducing and controlling compressed gases for impurity analysis
AIR LIQUIDE AMERICAN30 citations92
US6493086B1Dec 10, 2002
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN34 citations91
US6363728B1Apr 2, 2002
System and method for controlled delivery of liquefied gases from a bulk source
AIR LIQUIDE AMERICAN45 citations91
US6199384B1Mar 13, 2001
System and method for controlled delivery of liquefied gases including control aspects
AIR LIQUIDE AMERICAN23 citations91
US6122931ASep 26, 2000
System and method for delivery of a vapor phase product to a point of use
AIR LIQUIDE AMERICAN23 citations91
US6076359AJun 20, 2000
System and method for controlled delivery of liquified gases
AIR LIQUIDE AMERICAN39 citations91
US6032483AMar 7, 2000
System and method for delivery of a vapor phase product to a point of use
AIR LIQUIDE AMERICAN20 citations91
US5761911AJun 9, 1998
System and method for controlled delivery of liquified gases
AIR LIQUIDE AMERICAN38 citations91
US6736154B2May 18, 2004
Pressure vessel systems and methods for dispensing liquid chemical compositions
AIR LIQUIDE AMERICAN26 citations90
US6885452B2Apr 26, 2005
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
AIR LIQUIDE AMERICAN8 citations73
US5814741ASep 29, 1998
Metal sampling method and system for non-hydrolyzable gases
AIR LIQUIDE AMERICAN14 citations73
US5618996AApr 8, 1997
Metal sampling method and system for non-hydrolyzable gases
AIR LIQUIDE AMERICAN7 citations73
US5398712AMar 21, 1995
Purgeable connection for gas cylinders
AIR LIQUIDE AMERICAN13 citations73
US4964278AOct 23, 1990
Method of separating condensible vapors from particles in highly compressed gases
AIR LIQUIDE AMERICAN17 citations70
US4962673AOct 16, 1990
Pressure reduction device for particle sampling from compressed gases
AIR LIQUIDE AMERICAN7 citations68
US6899116B2May 31, 2005
Pressure vessel systems and methods for dispensing liquid chemical compositions
AIR LIQUIDE AMERICAN0 citations50