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Inventor
ILIC BOJAN ROBERT
US
2 patents
Patents
2 patents
US8174352B2
May 8, 2012
Method for making a transducer, transducer made therefrom, and applications thereof
PARPIA JEEVAK M
18 citations
87
US8704315B2
Apr 22, 2014
CMOS integrated micromechanical resonators and methods for fabricating the same
PARPIA JEEVAK M
1 citations
46