Inventor
SHUFFLEBOTHAM PAUL KEVIN
US11 patents
⚠️ This page may combine multiple inventors who share the name “SHUFFLEBOTHAM PAUL KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS6184158B1Feb 6, 2001
Inductively coupled plasma CVD
LAM RES CORP193 citations97
US6106678AAug 22, 2000
Method of high density plasma CVD gap-filling
LAM RES CORP635 citations97
US6888040B1May 3, 2005
Method and apparatus for abatement of reaction products from a vacuum processing chamber
LAM RES CORP64 citations96
US5838529ANov 17, 1998
Low voltage electrostatic clamp for substrates such as dielectric substrates
LAM RES CORP125 citations96
US5711998AJan 27, 1998
Method of polycrystalline silicon hydrogenation
LAM RES CORP56 citations95
US5669977ASep 23, 1997
Shape memory alloy lift pins for semiconductor processing equipment
LAM RES CORP66 citations95
US5805408ASep 8, 1998
Electrostatic clamp with lip seal for clamping substrates
LAM RES CORP86 citations94
US5847918ADec 8, 1998
Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
LAM RES CORP32 citations92
US6626185B2Sep 30, 2003
Method of depositing a silicon containing layer on a semiconductor substrate
LAM RES CORP21 citations91