Inventor

WATSO ROBERT DOUGLAS

US6 patents

⚠️ This page may combine multiple inventors who share the name “WATSO ROBERT DOUGLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9599908B2Mar 21, 2017

WATSO ROBERT DOUGLAS

1 patent

US8823918B2Sep 2, 2014

Lithographic apparatus and a method of operating the apparatus

WATSO ROBERT DOUGLAS7 citations76

LEENDERS MARTINUS HENDRIKUS ANTONIUS

1 patent

US9019466B2Apr 28, 2015

Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system

LEENDERS MARTINUS HENDRIKUS ANTONIUS2 citations61

DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS

1 patent

US9158206B2Oct 13, 2015

Lithographic apparatus and contamination removal or prevention method

DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS1 citations59