Inventor

BARREIRO JEAN

FR3 patents

⚠️ This page may combine multiple inventors who share the name “BARREIRO JEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNAXIS BALZERS AG

2 patents

US6502530B1Jan 7, 2003

Design of gas injection for the electrode in a capacitively coupled RF plasma reactor

UNAXIS BALZERS AG537 citations97

US7306829B2Dec 11, 2007

RF plasma reactor having a distribution chamber with at least one grid

UNAXIS BALZERS AG11 citations82

TURLOT EMMANUEL

1 patent

US9045828B2Jun 2, 2015

RF plasma reactor having a distribution chamber with at least one grid

TURLOT EMMANUEL3 citations55