Inventor
PHI JUSTIN
US7 patents
Patents
7 patentsUS9872373B1Jan 16, 2018
Smart multi-level RF pulsing methods
APPLIED MATERIALS INC102 citations97
US9788405B2Oct 10, 2017
RF power delivery with approximated saw tooth wave pulsing
APPLIED MATERIALS INC47 citations93
US10490429B2Nov 26, 2019
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC2 citations71
US9741539B2Aug 22, 2017
RF power delivery regulation for processing substrates
APPLIED MATERIALS INC4 citations70
US10854427B2Dec 1, 2020
Radio frequency (RF) pulsing impedance tuning with multiplier mode
APPLIED MATERIALS INC1 citations62
US11615973B2Mar 28, 2023
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC0 citations61
US10468233B2Nov 5, 2019
RF power delivery regulation for processing substrates
APPLIED MATERIALS INC1 citations60