Inventor
KUBO HIROYOSHI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “KUBO HIROYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
13 patentsUS5162642ANov 10, 1992
Device for detecting the position of a surface
CANON KK75 citations95
US7282821B2Oct 16, 2007
Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus
CANON KK22 citations92
US6992755B2Jan 31, 2006
Positioning apparatus and method for manufacturing same
CANON KK13 citations92
US5323016AJun 21, 1994
Focusing method
CANON KK50 citations92
US4874954AOct 17, 1989
Projection exposure apparatus
CANON KK36 citations92
US7561016B2Jul 14, 2009
Iron core, iron core manufacturing method, alignment apparatus, and exposure apparatus
CANON KK10 citations84
US7084731B2Aug 1, 2006
Iron core, iron core manufacturing method, alignment apparatus, and exposure apparatus
CANON KK12 citations84
US7061588B2Jun 13, 2006
Positioning apparatus and method of manufacturing same
CANON KK4 citations73
US6476904B1Nov 5, 2002
Projection exposure method and apparatus
CANON KK13 citations73
US7193687B2Mar 20, 2007
Positioning apparatus and method for manufacturing same
CANON KK1 citations62
US7075624B2Jul 11, 2006
Positioning apparatus and method for manufacturing same
CANON KK3 citations62
US6771351B2Aug 3, 2004
Projection exposure method and apparatus
CANON KK4 citations62
US7184127B2Feb 27, 2007
Exposure apparatus having separately supported first and second shades and method for manufacturing semiconductor device
CANON KK0 citations52
MITSUBISHI HEAVY IND LTD
7 patentsUS11181130B2Nov 23, 2021
Method and system for diagnosing abnormality of hydraulic device
MITSUBISHI HEAVY IND LTD0 citations51
US10961903B2Mar 30, 2021
Supercharging system, control device for supercharging system, and method for operating supercharging system
MITSUBISHI HEAVY IND LTD0 citations50
US10844842B2Nov 24, 2020
Abnormality monitoring apparatus and abnormality monitoring method for wind farm
MITSUBISHI HEAVY IND LTD0 citations41
US10533490B2Jan 14, 2020
Supercharging system of internal combustion engine and method of controlling supercharging system
MITSUBISHI HEAVY IND LTD0 citations41
US10753272B2Aug 25, 2020
Engine supercharger for maintaining a battery charge
MITSUBISHI HEAVY IND LTD0 citations39
US10458322B2Oct 29, 2019
Surge determination device, surge determination method, and program
MITSUBISHI HEAVY IND LTD0 citations39
US10174690B2Jan 8, 2019
Auxiliary-machine control device, control system, turbocharger, control method, and program
MITSUBISHI HEAVY IND LTD0 citations39
MITSUBISHI HITACHI POWER SYS
2 patentsUS11002640B2May 11, 2021
Device abnormality diagnosis method and device abnormality diagnosis device
MITSUBISHI HITACHI POWER SYS3 citations68
US10527371B2Jan 7, 2020
Heat exchanger monitoring device that determines the presence or absence of an anomaly of a heat transfer surface of a heat transfer tube
MITSUBISHI HITACHI POWER SYS1 citations59