Inventor

SUN NOEL

US4 patents

⚠️ This page may combine multiple inventors who share the name “SUN NOEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US9972502B2May 15, 2018

Systems and methods for performing in-situ deposition of sidewall image transfer spacers

LAM RES CORP2 citations69

US10515815B2Dec 24, 2019

Atomic layer deposition and etch in a single plasma chamber for fin field effect transistor formation

LAM RES CORP4 citations67

SUN NOEL

1 patent

US9533332B2Jan 3, 2017

Methods for in-situ chamber clean utilized in an etching processing chamber

SUN NOEL4 citations63

SHEN MEIHUA

1 patent

US8101525B2Jan 24, 2012

Method for fabricating a semiconductor device having a lanthanum-family-based oxide layer

SHEN MEIHUA4 citations52