Inventor

WOERLE SABINE

AT3 patents

Patents

3 patents

US10787735B2Sep 29, 2020

Coating source

PLANSEE COMPOSITE MAT GMBH1 citations55

US10781102B2Sep 22, 2020

Coating source for producing doped carbon layers

PLANSEE COMPOSITE MAT GMBH0 citations41

US10109468B2Oct 23, 2018

Sputtering target

PLANSEE COMPOSITE MAT GMBH0 citations36