Inventor
HASAN TANBIR
US4 patents
Patents
4 patentsUS11029614B2Jun 8, 2021
Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US11669020B2Jun 6, 2023
Method and apparatus for pattern fidelity control
ASML NETHERLANDS BV0 citations59
US10908515B2Feb 2, 2021
Method and apparatus for pattern fidelity control
ASML NETHERLANDS BV1 citations59
US12548141B2Feb 10, 2026
Active learning-based defect location identification
ASML NETHERLANDS BV0 citations43