Inventor
JAIN VIVEK KUMAR
US7 patents
Patents
7 patentsUS11003093B2May 11, 2021
Process variability aware adaptive inspection and metrology
ASML NETHERLANDS BV5 citations82
US10514614B2Dec 24, 2019
Process variability aware adaptive inspection and metrology
ASML NETHERLANDS BV8 citations82
US10859926B2Dec 8, 2020
Methods for defect validation
ASML NETHERLANDS BV7 citations79
US12242201B2Mar 4, 2025
Determining hot spot ranking based on wafer measurement
ASML NETHERLANDS BV0 citations60
US12092965B2Sep 17, 2024
Process variability aware adaptive inspection and metrology
ASML NETHERLANDS BV0 citations60
US11669020B2Jun 6, 2023
Method and apparatus for pattern fidelity control
ASML NETHERLANDS BV0 citations59
US10908515B2Feb 2, 2021
Method and apparatus for pattern fidelity control
ASML NETHERLANDS BV1 citations59