Inventor · disambiguated record
Shinichi Egashira
Also filed as: EGASHIRA SHINICHI
14 granted patents·6 pending applications·7 citations·filing 2007–2023
84Inventor score
Top patents by PatentIndex Score
20 records- 0193US11726412B2Processing system, processing method, measurement apparatus, substrate processing apparatus and article manufacturing methodCANON KK·Filed 2022·Granted Aug 15, 2023·2 cites·23 claims
- 0271US12140878B2Processing system, processing method, measurement apparatus, substrate processing apparatus and article manufacturing methodCANON KK·Filed 2023·Granted Nov 12, 2024·0 cites·4 claims
- 0368US10831116B2Pattern forming apparatus, deciding method, storage medium, information processing apparatus, and article manufacturing methodCANON KK·Filed 2018·Granted Nov 10, 2020·1 cites·28 claims
- 0464US10185235B2Measurement apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted Jan 22, 2019·1 cites·16 claims
- 0561US8518614B2Mark position detection apparatusEGASHIRA SHINICHI·Filed 2007·Granted Aug 27, 2013·2 cites·11 claims
- 0659US9524528B2Management apparatus and management methodFUJITSU FSAS INC·Filed 2015·Granted Dec 20, 2016·1 cites·4 claims
- 0757US11067908B2Measurement apparatus, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2020·Granted Jul 20, 2021·0 cites·13 claims
- 0855US12025924B2Method of determining set of sample shot regions, method of obtaining measurement value, information processing apparatus, lithography apparatus, storage medium, and article manufacturing methodCANON KK·Filed 2021·Granted Jul 2, 2024·0 cites·20 claims
- 0952US11360401B2Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2020·Granted Jun 14, 2022·0 cites·14 claims
- 1050US2021090231A1Method and apparatus of determining mark positionCANON KK·Filed 2020·Application pending·0 cites
- 1148US7921238B2USB host system and method for transferring transfer dataPANASONIC CORP·Filed 2008·Granted Apr 5, 2011·0 cites·2 claims
- 1247US7764357B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Granted Jul 27, 2010·0 cites·9 claims
- 1346US2009191651A1Positioning apparatus, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 1443US10185225B2Lithography apparatus and article manufacturing methodCANON KK·Filed 2017·Granted Jan 22, 2019·0 cites·14 claims
- 1542US2013321811A1Measuring method, and exposure method and apparatusCANON KK·Filed 2013·Application pending·0 cites
- 1639US8107051B2Exposure apparatus with improved alignment mark position measurement condition setting feature, and device manufacturing method using the sameEGASHIRA SHINICHI·Filed 2007·Granted Jan 31, 2012·0 cites·11 claims
- 1738US2011022737A1Device control method and device selecting apparatusPANASONIC CORP·Filed 2010·Application pending·0 cites
- 1838US2010277710A1Exposure apparatusCANON KK·Filed 2010·Application pending·0 cites
- 1935US9575413B2Exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2015·Granted Feb 21, 2017·0 cites·13 claims
- 2026US2015261738A1Inspection supporting apparatus and inspection supporting methodFUJITSU FSAS INC·Filed 2015·Application pending·0 cites
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