Inventor
DECAIN DONALD M
US8 patents
Patents
8 patentsUS5192870AMar 9, 1993
Optical submicron aerosol particle detector
IBM69 citations96
US5133602AJul 28, 1992
Particle path determination system
IBM55 citations96
US5343290AAug 30, 1994
Surface particle detection using heterodyne interferometer
IBM36 citations92
US5834642ANov 10, 1998
Downstream monitor for CMP brush cleaners
IBM17 citations91
US5061070AOct 29, 1991
Particulate inspection of fluids using interferometric light measurements
IBM26 citations91
US5294806AMar 15, 1994
Optical submicron aerosol particle detector
IBM15 citations73
US5974868ANov 2, 1999
Downstream monitor for CMP brush cleaners
IBM13 citations72
US5158690AOct 27, 1992
Thermophoretic filtering of liquids
IBM18 citations72