Inventor
TAUBENBLATT MARC A
US19 patents
⚠️ This page may combine multiple inventors who share the name “TAUBENBLATT MARC A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
18 patentsUS5220403AJun 15, 1993
Apparatus and a method for high numerical aperture microscopic examination of materials
IBM268 citations99
US5208648AMay 4, 1993
Apparatus and a method for high numerical aperture microscopic examination of materials
IBM171 citations99
US5177559AJan 5, 1993
Dark field imaging defect inspection system for repetitive pattern integrated circuits
IBM195 citations99
US5432607AJul 11, 1995
Method and apparatus for inspecting patterned thin films using diffracted beam ellipsometry
IBM106 citations98
US6442445B1Aug 27, 2002
User configurable multivariate time series reduction tool control method
IBM94 citations96
US5133602AJul 28, 1992
Particle path determination system
IBM55 citations96
US5037202AAug 6, 1991
Measurement of size and refractive index of particles using the complex forward-scattered electromagnetic field
IBM84 citations96
US6678569B2Jan 13, 2004
User configurable multivariate time series reduction tool control method
IBM66 citations94
US5343290AAug 30, 1994
Surface particle detection using heterodyne interferometer
IBM36 citations92
US6584368B2Jun 24, 2003
User configurable multivariate time series reduction tool control method
IBM36 citations91
US5834642ANov 10, 1998
Downstream monitor for CMP brush cleaners
IBM17 citations91
US5061070AOct 29, 1991
Particulate inspection of fluids using interferometric light measurements
IBM26 citations91
US9912413B1Mar 6, 2018
Electro-optic phase modulator with no residual amplitude modulation
IBM8 citations84
US9735879B2Aug 15, 2017
Near-threshold optical transmitter pre-distortion
IBM7 citations84
US10488605B1Nov 26, 2019
Photonic waveguide coupling using offset light source
IBM13 citations83
US11145142B2Oct 12, 2021
Detection of road surface defects
IBM5 citations73
US5974868ANov 2, 1999
Downstream monitor for CMP brush cleaners
IBM13 citations72
US10613279B2Apr 7, 2020
Photonic waveguide coupling using offset light source
IBM0 citations51