Inventor
GUTHRIE WILLIAM E
US9 patents
⚠️ This page may combine multiple inventors who share the name “GUTHRIE WILLIAM E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
D2S INC
8 patentsUS11062878B2Jul 13, 2021
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC5 citations83
US10748744B1Aug 18, 2020
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC5 citations83
US11756765B2Sep 12, 2023
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC2 citations71
US11592802B2Feb 28, 2023
Method and system of reducing charged particle beam write time
D2S INC0 citations61
US10884395B2Jan 5, 2021
Method and system of reducing charged particle beam write time
D2S INC0 citations61
US12243712B2Mar 4, 2025
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC0 citations60
US11886166B2Jan 30, 2024
Method and system of reducing charged particle beam write time
D2S INC0 citations60
US11604451B2Mar 14, 2023
Method and system of reducing charged particle beam write time
D2S INC0 citations60