Inventor
PEARMAN RYAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “PEARMAN RYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
D2S INC
11 patentsUS11062878B2Jul 13, 2021
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC5 citations83
US10748744B1Aug 18, 2020
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC5 citations83
US9038003B2May 19, 2015
Method and system for critical dimension uniformity using charged particle beam lithography
D2S INC12 citations83
US10460071B2Oct 29, 2019
Shaped beam lithography including temperature effects
D2S INC4 citations72
US11756765B2Sep 12, 2023
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC2 citations71
US11592802B2Feb 28, 2023
Method and system of reducing charged particle beam write time
D2S INC0 citations61
US10884395B2Jan 5, 2021
Method and system of reducing charged particle beam write time
D2S INC0 citations61
US9104109B2Aug 11, 2015
Method and system for improving critical dimension uniformity using shaped beam lithography
D2S INC2 citations61
US12243712B2Mar 4, 2025
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC0 citations60
US11886166B2Jan 30, 2024
Method and system of reducing charged particle beam write time
D2S INC0 citations60
US11604451B2Mar 14, 2023
Method and system of reducing charged particle beam write time
D2S INC0 citations60