Inventor
LIM MEEHYUN
KR7 patents
Patents
7 patentsUS11782085B2Oct 10, 2023
Semiconductor test device and system and test method using the same
SAMSUNG ELECTRONICS CO LTD5 citations70
US12332298B2Jun 17, 2025
Semiconductor test device and system and test method using the same
SAMSUNG ELECTRONICS CO LTD0 citations58
US12105132B2Oct 1, 2024
Electric field measuring apparatus and method of measuring electric field using the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US12562357B2Feb 24, 2026
Apparatus for monitoring a plasma process
SAMSUNG ELECTRONICS CO LTD0 citations56
US12170233B2Dec 17, 2024
Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method
SAMSUNG ELECTRONICS CO LTD0 citations56
US12555757B2Feb 17, 2026
Semiconductor equipment monitoring apparatus, and semiconductor equipment including the semiconductor equipment monitoring apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US12235287B2Feb 25, 2025
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations44