Inventor

HERCHEN HARALD

US70 patents

⚠️ This page may combine multiple inventors who share the name “HERCHEN HARALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HERCHEN HARALD

APPLIED MATERIALS INC

Etch enhancement using an improved gas distribution plate

Cluster tool architecture for processing a substrate

Substrate cleaning apparatus and method

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Gas distribution plate

Electrostatic chuck having an electrical connector with housing

Distributed microwave plasma reactor for semiconductor processing

Pressure actuated sealing diaphragm for chucks

Polymer removal from top surfaces and sidewalls of a semiconductor wafer

Monocrystalline ceramic coating having integral bonding interconnects for electrostatic chucks

Distributed microwave plasma reactor for semiconductor processing

Semiconductor process chamber and processing method

Microwave-activated etching of dielectric layers

Contact ring with embedded flexible contacts

Monocrystalline ceramic electrostatic chuck

Bipolar electrostatic chuck and method of making same

Electric field reducing thrust plate

Apparatus and method for detecting a presence or position of a substrate

Apparatus for sidewall profile control during an etch process

Low volume gas distribution assembly for a chemical downstream etch tool

Low volume gas distribution assembly and method for a chemical downstream etch tool

Substrate process chamber and processing method

Plating uniformity control by contact ring shaping

Liquid isolation of contact rings

Chamber having improved gas energizer and method

Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket

Double-walled mircrowave plasma based applicator

Polymer removal from top surfaces and sidewalls of a semiconductor wafer

Anode isolation by diffusion differentials

Method for removing electrolyte from electrical contacts and wafer touching areas

BLOOM ENERGY CORP

Coatings for SOFC metallic interconnects

Pre-formed powder delivery to powder press machine

Fuel cell interconnects and methods of fabrication

Fuel cell interconnect with reduced voltage degradation over time

Method of fabricating an interconnect for a fuel cell stack

Fuel cell interconnect

Serialization of fuel cell components

Method of measurement and estimation of the coefficient of thermal expansion in components

SOKUDO CO LTD

Cluster tool architecture for processing a substrate

Wafer bevel particle detection

Method and system for detection of wafer centering in a track lithography tool

Developer endpoint detection in a track lithography system

ISHIKAWA TETSUYA

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

HERCHEN HARALD

Non-destructive testing methods for fuel cell interconnect manufacturing

Substrate processing apparatus with heater element held by vacuum

STACKPOLE INT

Composition and processing of metallic interconnects for SOFC stacks