Inventor
SINGH VIKRAM
IN126 patents
⚠️ This page may combine multiple inventors who share the name “SINGH VIKRAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
11 patentsUS8926850B2Jan 6, 2015
Plasma processing with enhanced charge neutralization and process control
VARIAN SEMICONDUCTOR EQUIPMENT59 citations97
US7453059B2Nov 18, 2008
Technique for monitoring and controlling a plasma process
VARIAN SEMICONDUCTOR EQUIPMENT21 citations91
US7524743B2Apr 28, 2009
Conformal doping apparatus and method
VARIAN SEMICONDUCTOR EQUIPMENT22 citations89
US7397048B2Jul 8, 2008
Technique for boron implantation
VARIAN SEMICONDUCTOR EQUIPMENT23 citations89
US8937004B2Jan 20, 2015
Apparatus and method for controllably implanting workpieces
VARIAN SEMICONDUCTOR EQUIPMENT5 citations84
US7863194B2Jan 4, 2011
Implantation of multiple species to address copper reliability
VARIAN SEMICONDUCTOR EQUIPMENT9 citations83
US7476849B2Jan 13, 2009
Technique for monitoring and controlling a plasma process
VARIAN SEMICONDUCTOR EQUIPMENT10 citations83
US7528389B2May 5, 2009
Profile adjustment in plasma ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT8 citations80
US7737013B2Jun 15, 2010
Implantation of multiple species to address copper reliability
VARIAN SEMICONDUCTOR EQUIPMENT5 citations73
US8858816B2Oct 14, 2014
Enhanced etch and deposition profile control using plasma sheath engineering
VARIAN SEMICONDUCTOR EQUIPMENT4 citations72
US7687787B2Mar 30, 2010
Profile adjustment in plasma ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT6 citations71
NOVELLUS SYSTEMS INC
7 patentsUS6846745B1Jan 25, 2005
High-density plasma process for filling high aspect ratio structures
NOVELLUS SYSTEMS INC311 citations99
US6596654B1Jul 22, 2003
Gap fill for high aspect ratio structures
NOVELLUS SYSTEMS INC425 citations98
US6787483B1Sep 7, 2004
Gap fill for high aspect ratio structures
NOVELLUS SYSTEMS INC21 citations91
US7001854B1Feb 21, 2006
Hydrogen-based phosphosilicate glass process for gap fill of high aspect ratio structures
NOVELLUS SYSTEMS INC35 citations87
US6468384B1Oct 22, 2002
Predictive wafer temperature control system and method
NOVELLUS SYSTEMS INC50 citations87
US7067440B1Jun 27, 2006
Gap fill for high aspect ratio structures
NOVELLUS SYSTEMS INC17 citations84
US7122485B1Oct 17, 2006
Deposition profile modification through process chemistry
NOVELLUS SYSTEMS INC8 citations70
QUALCOMM INC
5 patentsUS9300713B2Mar 29, 2016
Clock synchronization for multi-processor/multi-chipset solution
QUALCOMM INC7 citations78
US12101843B2Sep 24, 2024
Triggering user equipment (UE) assistance information based on mobility and wake up signal (WUS) configuration
QUALCOMM INC2 citations73
US9736083B2Aug 15, 2017
Techniques for packet-switched video telephony setup with QOS preconditions
QUALCOMM INC2 citations72
US9565615B2Feb 7, 2017
Evolved hybrid internet protocol (IP) multimedia subsystem (IMS) architecture
QUALCOMM INC6 citations71
US10085029B2Sep 25, 2018
Switching display devices in video telephony
QUALCOMM INC2 citations70
GODET LUDOVIC
4 patentsUS8101510B2Jan 24, 2012
Plasma processing apparatus
GODET LUDOVIC50 citations98
US8664098B2Mar 4, 2014
Plasma processing apparatus
GODET LUDOVIC7 citations84
US8188445B2May 29, 2012
Ion source
GODET LUDOVIC15 citations84
US8603591B2Dec 10, 2013
Enhanced etch and deposition profile control using plasma sheath engineering
GODET LUDOVIC8 citations83
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS9514912B2Dec 6, 2016
Control of ion angular distribution of ion beams with hidden deflection electrode
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9 citations83
US9706634B2Jul 11, 2017
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12 citations82
US10224181B2Mar 5, 2019
Radio frequency extraction system for charge neutralized ion beam
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US10004133B2Jun 19, 2018
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations71
LAM RES CORP
3 patentsUS6042687AMar 28, 2000
Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing
LAM RES CORP185 citations98
US5968275AOct 19, 1999
Methods and apparatus for passivating a substrate in a plasma reactor
LAM RES CORP593 citations98
US6039836AMar 21, 2000
Focus rings
LAM RES CORP128 citations96
SAMSUNG ELECTRONICS CO LTD
3 patentsUS10019181B2Jul 10, 2018
Method of managing input/output(I/O) queues by non-volatile memory express(NVME) controller
SAMSUNG ELECTRONICS CO LTD23 citations93
US11995465B2May 28, 2024
Computing system with resource management mechanism and method of operation thereof
SAMSUNG ELECTRONICS CO LTD1 citations73
US10296383B2May 21, 2019
Computing system with resource management mechanism and method of operation thereof
SAMSUNG ELECTRONICS CO LTD2 citations73
SINGH VIKRAM
3 patentsPAPASOULIOTIS GEORGE D
2 patentsGEN ELECTRIC
2 patentsST MICROELECTRONICS INT NV
2 patentsMIXHALO CORP
1 patentHADIDI KAMAL
1 patentSHARMA ARUN K
1 patentENGLAND JONATHAN GERALD
1 patentShowing the top 50 of 126 patents by PatentIndex Score.