Inventor
AISOU FUMIKI
JP7 patents
Patents
7 patentsUS5926709AJul 20, 1999
Process of fabricating miniature memory cell having storage capacitor with wide surface area
NEC CORP33 citations92
US5796484AAug 18, 1998
System for detecting unevenness degree of surface of semiconductor device
NEC CORP34 citations90
US5677242AOct 14, 1997
Process of fabricating semiconductor integrated circuit device having small geometry contact by using spacer on photoresist mask
NEC CORP20 citations90
US5525540AJun 11, 1996
Method for manufacturing silicon layer having impurity diffusion preventing layer
NEC CORP14 citations72
US6074925AJun 13, 2000
Method for fabricating semiconductor device with polycide structure for electrode or interconnect
NEC CORP12 citations71
US5850288ADec 15, 1998
Method for manufacturing a semiconductor device
NEC CORP10 citations71
US5885889AMar 23, 1999
Process of fabricating semiconductor device having doped polysilicon layer without segregation of dopant impurity
NEC CORP6 citations60