P

Inventor

ZACH FRANZ

US11 patents
⚠️ This page may combine multiple inventors who share the name “ZACH FRANZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA CORP

4 patents
US11782411B2Oct 10, 2023

System and method for mitigating overlay distortion patterns caused by a wafer bonding tool

KLA CORP5 citations74
US11829077B2Nov 28, 2023

System and method for determining post bonding overlay

KLA CORP3 citations70
US12164277B2Dec 10, 2024

System and method for mitigating overlay distortion patterns caused by a wafer bonding tool

KLA CORP1 citations62
US12197137B2Jan 14, 2025

System and method for determining post bonding overlay

KLA CORP1 citations61

IBM

3 patents
US6936522B2Aug 30, 2005

Selective silicon-on-insulator isolation structure and method

IBM37 citations92
US7326983B2Feb 5, 2008

Selective silicon-on-insulator isolation structure and method

IBM8 citations73
US7923786B2Apr 12, 2011

Selective silicon-on-insulator isolation structure and method

IBM3 citations62

CADENCE DESIGN SYSTEMS INC

1 patent
US7784019B1Aug 24, 2010

Yield based retargeting for semiconductor design flow

CADENCE DESIGN SYSTEMS INC51 citations96

INFINEON TECHNOLOGIES CORP

1 patent
US6204187B1Mar 20, 2001

Contact and deep trench patterning

INFINEON TECHNOLOGIES CORP31 citations92

INFINEON TECHNOLOGIES AG

1 patent
US6270947B2Aug 7, 2001

Method and apparatus for reducing non-uniformity area effects in the manufacture of semiconductor devices

INFINEON TECHNOLOGIES AG0 citations51

KLA TENCOR CORP

1 patent
US10386829B2Aug 20, 2019

Systems and methods for controlling an etch process

KLA TENCOR CORP0 citations40